Metallurgical silicon refining using electron-beam plasma
نویسندگان
چکیده
Abstract The possibilities of plasma-chemical refining metallurgical silicon have been demonstrated. It is shown that by electron-beam it possible to reduce the concentration phosphorus and boron, as well main metallic impurities evaporation both these their volatile compounds.
منابع مشابه
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'G. C. Salter and R. E. Thomas, Solid State Electron. 20, 95 (1977). 2p. Van Halen, R. P. Mertens, R. J. Van Overstraeten, R. E. Thomas, and J. Van Meerbergen, IEEE Trans. Electron Devices ED.25, 507 (19781. -c. E. Norman and R. E. Thomas, IEEE Trans. Electron Devices ED-27, 731 (1980). 4R. E. Thomas, R. B. North, and C. E. Norman, IEEE Electron Device Lett. EDL-l, 79 (1980). Sp. DeVisschere, I...
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ژورنال
عنوان ژورنال: Journal of physics
سال: 2021
ISSN: ['0022-3700', '1747-3721', '0368-3508', '1747-3713']
DOI: https://doi.org/10.1088/1742-6596/2119/1/012100